Publikationen

Journal

  • P. Gribisch, A. Fissel (2021): Interfacial layer formation during the growth of Gd2O3 on Si(001) and its thermal stability Semiconductor Science and Technology 36(11) (2021) 115016Semiconductor Science and Technology 36(11) (2021) 115016
    DOI: 10.1088/1361-6641/ac2962
  • P. Gribisch, A. Fissel (2020): Tuning of structural and dielectric properties of Gd2O3 grown on Si(001)Journal of Applied Physics 128 (2020) 055108
    DOI: 10.1063/5.0007793
  • A. Fissel (2019): THERMODYNAMICS AND KINETICS OF NANOCLUSTER FORMATION ON SEMICONDUCTOR SURFACES: THE EXAMPLE OF SI GROWTH ON SIC(0001)Journal of International Scientific Publications: Materials,Methods & Technologies 13 (2019) 1 (https://www.scientific-publications.net/en/article/1001874/)
  • A. Fissel, A. R. Chaudhuri, J. Krügener, H. J. Osten (2019): Corrigendum to “Influence of (7×7)–“1×1” phase transition on step-free area formation inmolecular beam epitaxial growth of Si on Si(111)”Journal of Crystal Growth 524 (2019) 125155
    DOI: 10.1016/j.jcrysgro.2019.125155
  • P. Gribisch, A. Roy Chaudhuri, A. Fissel (2019): Growth and Dielectric Properties of Monoclinic Gd2O3 on Si(001)ECS Transactions 3 (2019) 57
    DOI: 10.1149/09301.0057ecst
  • P. Gribisch, J. Schmidt, H.-J. Osten, A. Fissel (2019): Influence of nanostructure formation on the crystal structure and morphology of epitaxially grown Gd2O3 on Si(001)Acta Crystallographica Section B75 (2019) 59
    DOI: 10.1107/S2052520618017869
  • A. R. Chaudhuri, A. Fissel, H. J. Osten (2017): Epitaxial lanthanide oxide thin films on Si for high-k gate dielectric application: Growth optimization and defect passivationJournal of Materials Research 32 (2017) 699
    DOI: 10.1557/jmr.2017.22
  • A. Grimm, A. Fissel, E. Bugiel, T. F. Wietler (2016): In situ observation of low temperature growth of Ge on Si(111) by reflection high energy electron diffractionApplied Surface Science 370 (2016) 40
    DOI: 10.1016/j.apsusc.2016.02.144
  • K. Ghosh, S. Das, A. Fissel, H.J. Osten, A. Laha (2016): Long-Term Stability of Epitaxial (Nd₁₋ₓGdₓ)₂O₃ Thin Films Grown on Si(001) for Future CMOS DevicesIEEE Transactions on Electron Devices 63 (2016) 2852
    DOI: 10.1109/TED.2016.2566681
  • L. Wang, S. Dimitrijev, A. Fissel, G. Walker, J. Chai, L. Hold, A. Fernandes, N.-T. Nguyen, A. Iacopi (2016): Growth mechanism for alternating supply epitaxy: the unique pathway to achieve uniform silicon carbide films on multiple large-diameter silicon substratesRCS Advances 20 (2016) 16662
    DOI: 10.1039/C5RA24797G
  • A. Fissel, A. R. Chaudhuri, J. Krügener, H.-J. Osten (2015): Influence of "1x1"- (7x7) phase transition on step-free area formation in molecular beam epitaxial growth of Si on Si(111)Journal of Crystal Growth 425 (2015) 154
    DOI: 10.1016/j.jcrysgro.2015.02.041
  • A. Fissel, A. R. Chaudhuri, J. Krügener, P. Gribisch, H.-J. Osten (2015): Impact of surface phase coexistence on the development of step-free areas on Si(111)Frontiers of Materials Science 9 (2015) 141
    DOI: 10.1007/s11706-015-0282-z
  • A. R. Chaudhuri, A. Fissel, and H.-J. Osten (2015): Erratum:“Superior dielectric properties for template assisted grown (100) oriented Gd2O3 thin films on Si (100)”[Appl. Phys. Lett. 104 (2014) 012906]Applied Physics Letters 106 (2015) 149903
    DOI: 10.1063/1.4917251
  • A. R. Chaudhuri, H. J. Osten, and A. Fissel (2015): Impact of boron on the step-free area formation on Si(111) mesa structuresJournal of Applied Physics 118 (2015) 245308
    DOI: 10.1063/1.4939160
  • A. R. Chaudhuri, A. Fissel, H.-J. Osten (2014): Superior dielectric properties for template assisted grown (100) oriented Gd2O3 thin films on Si(100)Applied Physics Letters 104 (2014) 012906
    DOI: 10.1063/1.4861470
  • A. R. Chauhuri, A. Fissel, H.-J. Osten (2014): Enhanced Dielectric Properties of Nitrogen Doped Epitaxial Gd2O3 Thin Films on Siphysica status solidi C 11 (2014) 1412
    DOI: 10.1002/pssc.201300596
  • H.-J. Osten, A. Fissel (2014): KristallstrukturengineeringUnimagazin der Leibniz Universität Hannover 01/02 (2014) 50
  • H.-J. Osten, D. Schwendt, A. R. Chaudhuri, A. Fissel, P. Shekhter, M. Eizenberg (2014): Tuning Dielectric Properties of Epitaxial Lanthanide Oxides on SiliconECS Transactions 61 (2014) 3
    DOI: 10.1149/06102.0003ecst
  • A. Laha, A. Fissel, H.-J. Osten (2013): Effective control on flat band voltage of epitaxial lanthanide oxide based MOS capacitors by interfacial carbonApplied Physics Letters 102 (2013) 202902
    DOI: 10.1063/1.4807588
  • A. R. Chaudhuri, A. Fissel, H.-J. Osten (2013): Investigation of band offsets and dc leakage properties of nitrogen doped epitaxial Gd2O3 thin films on SiJournal of Applied Physics 113 (2013) 184108
    DOI: 10.1063/1.4804245
  • A. R. Chaudhuri, A. Fissel, V. R. Archakam, H.-J. Osten (2013): Improving dielectric properties of epitaxial Gd2O3 thin films on silicon by nitrogen dopingApplied Physics Letters 102 (2013) 022904
    DOI: 10.1063/1.4775688
  • J. Krügener, H.-J. Osten, A. Fissel (2013): Morphology of mesa surfaces on Si(111) prepared by molecular beam epitaxy at temperatures around the (7x7)-“1x1” surface phase transistionSurface Science 618 (2013) 27
    DOI: 10.1016/j.susc.2013.08.017
  • K. Ghosh, S. Das, A. Fissel, H.-J. Osten, A. Laha (2013): Epitaxial Gd2O3 on strained Si1-xGex virtual substrate for next generation complementary metal oxide semiconductor device applicationApplied Physics Letters 103 (2013) 153501
    DOI: 10.1063/1.4824422
  • A. Fissel, J. Krügener, H.-J. Osten (2012): Preparation of large step-free mesas on Si(111) by molecular beam epitaxyphysica status solidi C 9 (2012) 2050
    DOI: 10.1002/pssc.201200139
  • T. Breuer, U. Kerst, C. Boit, E. Langer, H. Ruelke, A. Fissel (2012): Conduction and material transport phenomena of degradation in electrically stressed ultra low-k dielectric before breakdownJournal of Applied Physics 112 (2012) 124103
    DOI: 10.1063/1.4768918
  • A. Fissel, J. Krügener, H.-J. Osten (2011): Towards controlled molecular beam epitaxial growth of artificially layered Si structuresJournal of Crystal Growth 323 (2011) 144
    DOI: 10.1016/j.jcrysgro.2010.12.001
  • A. Laha, A. Bin, P. R. P. Babu, A. Fissel, H.-J. Osten (2011): Enhanced electrical properties of carbon doped epitaxial Gd2O3 thin films on silicon substratesECS Transactions 41 (2011) 101
    DOI: 10.1149/1.3633025
  • A. Laha, B. Ai, P. R. P. Babu, A. Fissel, H.-J. Osten (2011): Impact of carbon incorporation into epitaxial Gd2O3 thin films on silicon: An experimental study on electrical propertiesApplied Physics Letters 99 (2011) 152902
    DOI: 10.1063/1.3646104
  • J. Krügener, H.-J. Osten, A. Fissel (2011): Ultraviolet photoelectron spectroscopic study of elemental boron adsorption and surface segregation on Si(111)Physical Review B 83 (2011) 205303
    DOI: 10.1103/PhysRevB.83.205303
  • A. Fissel, J. Krügener, D. Schwendt, H.J. Osten (2010): Role of boron and (√3x√3)-B surface defects on the growth mode of Si on Si(111)A photoemission and electron diffraction study, physica status solidi A 207 (2010) 245
    DOI: 10.1002/pssa.200982433
  • A. Fissel, R. Dargis, E. Bugiel, D. Schwendt, T. Wietler, J. Krügener, A. Laha, H.-J. Osten (2010): Single-crystalline Si grown on single-crystalline Gd2O3 by modified solid-phase epitaxyThin Solid Films 518 (2010) 2546
    DOI: 10.1016/j.tsf.2009.09.139
  • A. Laha, A. Fissel, H.-J. Osten (2010): Effect of Ge passivation on interfacial properties of crystalline Gd2O3 thin films grown on Si substratesApplied Physics Letters 96 (2010) 072903
    DOI: 10.1063/1.3318260
  • H.-J. Osten, A. Laha, A. Fissel (2010): Si Nanostructures Embedded into Crystalline Rare Earth Oxide Matrix for Opto and Nano Electronic DevicesProceedings of the 4th International Conference on Quantum, Nano and Micro Technologies (2010) 38
    DOI: 10.1109/ICQNM.2010.14
  • J. X. Wang, T. Liu, Z. Wang, E. Bugiel, A. Laha, T. Watahiki, R. Shayduk, W. Braun, A. Fissel, H.-J. Osten (2010): Epitaxial multi-component rare-earth oxide: A high-k material with ultralow mismatch to SiMaterials Letters 64 (2010) 866
    DOI: 10.1016/j.matlet.2010.01.045
  • R. Dargis, A. Fissel, D. Schwendt, J. Krügener, T. Wietler, A. Laha, E. Bugiel, H.-J. Osten (2010): Epitaxial growth and thermal stability of silicon layers on crystalline rare-earth metal oxidesVacuum 85 (2010) 523
    DOI: 10.1016/j.vacuum.2010.01.026
  • A. Fissel, A. Laha, E. Bugiel, R. Dargis, A. Ali, H.J. Osten (2009): Tailoring of Si nanostructures embedded into epitaxial oxides for various applicationsWorld Journal of Engineering 6 (2009) 245
  • A. Fissel, J. Krügener, H.-J. Osten (2009): Influence of boron on the initial stages of Si molecular beam epitaxy on Si(111) studied by reflection high-energy electron diffractionSurface Science 603 (2009) 477
    DOI: 10.1016/j.susc.2008.12.004
  • A. Laha, E. Bugiel, M. Jestremski, R. Ranjith, A. Fissel, H.-J. Osten (2009): Encapsulated solid phase epitaxy of a Ge quantum well embedded in an epitaxial rare earth oxideNanotechnology 20 (2009) 475604
    DOI: 10.1088/0957-4484/20/47/475604
  • A. Laha, E. Bugiel, R. Dargis, D. Schwendt, M. Badylevich, V.V. Afanas’ev, A. Stesmans, A. Fissel, H.-J. Osten (2009): Integration of low dimensional crystalline Si into functional epitaxial oxidesMicroelectronics Journal 40 (2009) 633
    DOI: 10.1016/j.mejo.2008.06.064
  • H.-J. Osten, A. Fissel, A. Laha (2009): Introducing Crystalline Rare-Earth Oxides into Si-based ElectronicsProceedings of the XVth International Workshop on the Physics of Semiconductor Devices (IWPSD-2009) 107
  • H.-J. Osten, A. Laha, A. Fissel (2009): Epitaxial Lanthanide Oxide based Gate DielectricsMRS Proceedings 1155: CMOS Gate-Stack Scaling — Materials, Interfaces and Reliability Implications (2009) 97
    DOI: 10.1557/PROC-1155-C01-01
  • J. Wang, A. Laha, A. Fissel, D. Schwendt, R. Dargis, T. Watahiki, R. Shayduka, W. Braun, T. M. Liu, H.-J. Osten (2009): Crystal structure and strain state of molecular beam epitaxial grown Gd2O3 on Si(111) substrates: a diffraction studySemiconductor Science and Technology 24 (2009) 045021
    DOI: 10.1088/0268-1242/24/4/045021
  • J. Wang, A. Laha, A. Fissel, D. Schwendt, R. Dargis, T. Watahiki, T. Liu, H.-J. Osten (2009): Structural Study of Epitaxially Grown Nano-thick Nd2O3/Si(111) HeterostructureProceedings of the 4th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS) (2009) 431
    DOI: 10.1109/NEMS.2009.5068613
  • R. Dargis, A. Fissel, E. Bugiel, D. Schwendt, T. Wietler, A. Laha, H.-J. Osten (2009): Epitaxial Growth and Properties of Silicon on Crystalline Rare-Earth-Metal Oxide for SOI ApplicationsMaterial Science (MEDŽIAGOTYRA) 15 (2009) 11
  • R. Dargis, A. Fissel, E. Bugiel, T. Wietler, D. Schwendt, A. Laha, H.-J. Osten (2009): Development of multi-step procedure for epitaxial growth of crystalline silicon on rare-earth-metal oxide for SOI-applicationse-Journal of Surface Science and Nanotechnology 7 (2009) 405
    DOI: 10.1380/ejssnt.2009.405
  • R. Peibst, T. Dürkop, E. Bugiel, A. Fissel, I. Costina, K. R. Hofmann (2009): Driving mechanisms for the formation of nanocrystals by annealing of ultra-thin Ge layers in SiO2Physical Review B 79 (2009) 195316
    DOI: 10.1103/PhysRevB.79.195316
  • T. F. Wietler, A. Laha, E. Bugiel, M. Czernohorsky, R. Dargis, A. Fissel, H.-J. Osten (2009): Epitaxial growth of Gd2O3 on surfactant-mediated grown Ge films on Si(001) substratesSolid-State Electronics 53 (2009) 833
    DOI: 10.1016/j.sse.2009.04.027
  • V. V. Afanas’ev, M. Badylevich, A. Stesmans, A. Laha, H.-J. Osten, A. Fissel (2009): Size-dependent interface band alignment between Si nanocrystals and lattice-matched Gd2O3Applied Physics Letters 95 (2209) 102107
    DOI: 10.1063/1.3204019
  • A. Fissel, D. Kühne, E. Bugiel, A. Laha, M. Czernohorsky, R. Dargis, H.-J. Osten (2008): Silicon in functional epitaxial oxides: A new group of nanostructuresMicroelectronics Journal 39 (2008) 512
    DOI: 10.1016/j.mejo.2007.11.007
  • A. Fissel, J. Krügener, E. Bugiel, T. Block, H.-J. Osten (2008): Molecular beam epitaxial growth of Si on heavily boron-doped Si(111) surface: From initial stages to the growth of Si polytypesProceedings of the Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) (2008) 148
    DOI: 10.1109/COMMAD.2008.4802113
  • A. Laha, A. Fissel, E. Bugiel, M. Badylevich, V. Afanasiev, H.-J. Osten (2008): Integration of low dimensional crystalline Si into functional epitaxial oxides for next generation solar cell applicationProceedings of the Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) (2008) 148
    DOI: 10.1109/COMMAD.2008.4802118
  • A. Laha, D. Kühne, E. Bugiel, A. Fissel, H.-J. Osten (2008): Embedding silicon nanoclusters into epitaxial rare earth oxide for nonvolatile memory applicationsSemiconductor Science and Technology 23 (2008) 085015
    DOI: 10.1088/0268-1242/23/8/085015
  • A. Laha, E. Bugiel, A. Fissel, H.-J. Osten (2008): Si-nanoclusters embedded into epitaxial rare earth oxides: potential candidate for non-volatile memory applicationsMicroelectronic Engineering 85 (2008) 2350
    DOI: 10.1016/j.mee.2008.09.030
  • A. Laha, E. Bugiel, H.-J. Osten, A. Fissel (2008): Epitaxial Rare Earth Oxide Thin Film: Potential Candidate for Future Microelectronic Devices, Rare Earths: Research and ApplicationsEditor: Keith N. Delfrey, Nova Science Publishers (2008) 301
    ISBN: 978-1-60456-218-7
  • A. Laha, E. Bugiel, J. X. Wang, Q. Q. Sun, A. Fissel, H.-J. Osten (2008): Effect of domain boundaries on the electrical properties of crystalline Gd2O3 thin filmApplied Physics Letters 93 (2008) 182907
    DOI: 10.1063/1.3009206
  • H.-J. Osten, A. Laha, M. Czernohorsky, E. Bugiel, R. Dargis, A. Fissel (2008): Introducing crystalline rare-earth oxides into Si technologiesphysica status solidi A 205 (2008) 695
    DOI: 10.1002/pssa.200723509
  • M. Badylevich, S. Shamuilia, V. V. Afanas’ev, A. Stesmans, A. Laha, H.-J. Osten, A. Fissel (2008): Electronic structure at interfaces of cubic Gd2O3 with embedded Si nanocrystalsMicroelectronic Engineering 85 (2008) 2382
    DOI: 10.1016/j.mee.2008.09.002
  • Q.-Q. Sun, A. Laha, H.-J. Osten, S.-J. Ding, D. W. Zhang, A. Fissel (2008): Electrical Characterization of Ultrathin Single Crystalline Gd2O3/Si(100) with Pt Top ElectrodeProceedings of the 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT 2008) 1276
    DOI: 10.1109/ICSICT.2008.4734784
  • Q.-Q. Sun, A. Laha, S.-J. Ding, D. W. Zhang, H.-J. Osten, A. Fissel (2008): Observation of near interface oxide traps in single crystalline Nd2O3 on Si(111) by quasistatic C-V methodApplied Physics Letters 93 (2008) 083509
    DOI: 10.1063/1.2976325
  • Q.-Q. Sun, S.-J. Ding, D. W. Zhang, A. Laha, H.-J. Osten, A. Fissel (2008): Effective passivation of slow interface states at the interface of single crystalline Gd2O3 and Si(100)Applied Physics Letters 92 (2008) 152908
    DOI: 10.1063/1.2912523
  • V. V. Afanas’ev, M. Badylevich, A. Stesmans, A. Laha, H.-J. Osten, A. Fissel, W. Tian, L. F. Edge, D. G. Schlom (2008): Band offsets between Si and epitaxial rare earth sesquioxides (RE2O3, RE=La, Nd, Gd, Lu): Effect of 4f-shell occupancyApplied Physics Letters 93 (2008) 192105
    DOI: 10.1063/1.3003872
  • A. Fissel, M. Czernohorsky, R. Dargis, H.-J. Osten (2007): Growth and Properties of Gadolinium Oxide Dielectric Layers on Silicon Carbide for High-K ApplicationMaterial Science Forum 556-557 (2007) 655
    DOI: 10.4028/www.scientific.net/MSF.556-557.655
  • A. Laha, A. Fissel, E. Bugiel, H.-J. Osten (2007): Epitaxial multi-component rare earth oxide for high-K applicationThin Solid Films 515 (2007) 6512
    DOI: 10.1016/j.tsf.2006.11.070
  • A. Laha, A. Fissel, H.-J. Osten (2007): Influence of interface layer composition on the electrical properties of epitaxial Gd2O3 thin films for high-K applicationApplied Physics Letters 90 (2007) 113508
    DOI: 10.1063/1.2713142
  • A. Laha, A. Fissel, H.-J. Osten (2007): Engineering the interface between epitaxial lanthanide oxide thin films and Si substrates: a route towards tuning the electrical propertiesMicroelectronic Engineering 84 (2007) 2282
    DOI: 10.1016/j.mee.2007.04.051
  • E. Bugiel, A. Fissel, M. Czernohorsky, A. Laha, H.-J. Osten (2007): Integration of Functional Epitaxial Oxides into Silicon: A TEM InvestigationMicroscopy and Microanalysis 13 (2007) 304
    DOI: 10.1017/S1431927607081524
  • H.-J. Osten, A. Laha, M. Czernohorsky, R. Dargis, E. Bugiel, A. Fissel (2007): Crystalline Rare-Earth Oxides as High-k Materials for Future CMOS TechnologiesECS Transactions 11 (2007) 287
    DOI: 10.1149/1.2779568
  • H.-J. Osten, D. Kühne, A. Laha, M. Czernohorsky, E. Bugiel, A. Fissel (2007): Integration of functional epitaxial oxides into silicon: From high-K application to nanostructuresJournal of Vacuum Science & Technology B 25 (2007) 1039
    DOI: 10.1116/1.2720858
  • H.-J. Osten, D. Kühne, E. Bugiel, A. Fissel (2007): Fabrication of single crystalline insulator/Si/insulator double barrier nanostructures using cooperative vapor-solid-phase epitaxyPhysica E: Low-dimensional Systems and Nanostructures 38 (2007) 6
    DOI: 10.1016/j.physe.2006.12.012
  • H.-J. Osten, E. Bugiel, M. Czernohorsky, Z. Elassar, O. Kirfel, A. Fissel (2007): Molecular Beam Epitaxy of Rare-Earth OxidesIn Topics in Applied Physics Volume 106: Rare Earth Oxide Thin Films, Editors M. Fanciulli & G. Scarel, Springer-Verlag Berlin/Heidelberg (2007) 101
    DOI: 10.1007/11499893_7
    ISBN: 978-3-540-35796-4
  • H.-J. Osten, M. Czernohorsky, R. Dargis, A. Laha, D. Kühne, E. Bugiel, A. Fissel (2007): Integration of functional epitaxial oxides into silicon: From high-K application to nanostructuresMicroelectronic Engineering 84 (2007) 2222
    DOI: 10.1016/j.mee.2007.04.092
  • M. Badylevich, S. Shamuilia, V. V. Afanas’ev, A. Stesmans, A. Laha, H.-J. Osten, A. Fissel (2007): Investigation of the electronic structure at interfaces of crystalline and amorphous Gd2O3 thin layers with silicon substrates of different orientationsApplied Physics Letters 90 (2007) 252101
    DOI: 10.1063/1.2746419
  • A. Fissel, D. Kuehne, E. Bugiel, H.-J. Osten (2006): Novel Approach for Fabrication of Single-Crystalline Insulator/Si/Insulator NanostructureMRS Proceedings 928: Current and Future Trends of Functional Oxide Films, Editors: D. Kumar, V. Craciun, M. Alexe, K. K. Singh (2006) 0928-GG03-04
    DOI: 10.1557/PROC-0928-GG03-04
  • A. Fissel, D. Kühne, E. Bugiel, H.-J. Osten (2006): Cooperative solid-vapor-phase epitaxy: An approach for fabrication of single crystalline insulator/Si/insulator nanostructuresApplied Physics Letters 88 (2006) 153105
    DOI: 10.1063/1.2192979
  • A. Fissel, D. Kühne, E. Bugiel, H.-J. Osten (2006): Fabrication of single-crystalline insulator/Si/insulator nanostructuresJournal of Vacuum Science & Technology B 24 (2006) 2041
    DOI: 10.1116/1.2213266
  • A. Fissel, E. Bugiel, C. L. Wang, H.-J. Osten (2006): Formation of twinning-superlattice regions by artificial stacking of Si layersJournal of Crystal Growth 290 (2006) 392
    DOI: 10.1016/j.jcrysgro.2006.02.009
  • A. Fissel, E. Bugiel, C. R. Wang, H.-J. Osten (2006): Formation of Si twinning-superlattice; First steps towards Si-polytype growthMaterials Science and Engineering: B 134 (2006) 138
    DOI: 10.1016/j.mseb.2006.06.046
  • A. Fissel, M. Czernohorsky, H.-J. Osten (2006): Characterization of crystalline rare-earth oxide high-K dielectrics grown by molecular beam epitaxy on silicon carbideJournal of Vacuum Science & Technology B 24 (2006) 2115
    DOI: 10.1116/1.2214702
  • A. Fissel, M. Czernohorsky, H.-J. Osten (2006): Growth and characterization of crystalline gadolinium oxide on silicon carbide for high-K applicationSuperlattices and Microstructures 40 (2006) 551
    DOI: 10.1016/j.spmi.2006.07.002
  • A. Fissel, Z. Elassar, O. Kirfel, E. Bugiel, M. Czernohorsky, H.-J. Osten (2006): Interface Formation during Molecular beam Epitaxial Growth of Neodymium Oxide on SiliconJournal of Applied Physics 99 (2006) 074105
    DOI: 10.1063/1.2188051
  • A. Laha, A. Fissel, E. Bugiel, H.-J. Osten (2006): Crystalline ternary rare earth oxides with capacitance equivalent thickness below 1 nm for high-K applicationApplied Physics Letters 88 (2006) 172107
    DOI: 10.1063/1.2198518
  • A. Laha, E. Bugiel, H.J. Osten, A. Fissel (2006): Erratum: Crystalline ternary rare earth oxide with capacitance equivalent thickness below 1 nm for high-K application [Applied Physics Letters 88, 172107 (2006)]Applied Physics Letters 89 (2006) 139901
    DOI: 10.1063/1.2354313
  • A. Laha, H.-J. Osten, A. Fissel (2006): Impact of Si substrate orientations on electrical properties of crystalline Gd2O3 thin films for high-K applicationApplied Physics Letters 89 (2006) 143514
    DOI: 10.1063/1.2360209
  • E. Bugiel, H.-J. Osten, A. Fissel, O. Kirfel, M. Czernohorsky (2006): TEM Investigations of Epitaxial High-k Dielectrics on SiliconSpringer Proceedings in Physics 107: Microscopy of Semiconducting Materials, Editors A. G. Cullis & J. L. Hutchinson, Springer-Verlag Berlin Heidelberg (2006) 343
    DOI: 10.1007/3-540-31915-8_73
    ISBN: 978-3-540-31914-6
  • H. D. B. Gottlob, T. Echtermeyer, M. Schmidt, T. Mollenhauer, J. K. Efavi, T. Wahlbrink, M. C. Lemme, M. Czernohorsky, E. Bugiel, A. Fissel, H.-J. Osten, H. Kurz (2006): 0.86 nm CET Gate Stacks with Epitaxial Gd2O3 High-K Dielectrics and FUSI NiSi Metal ElectrodesIEEE Electron Device Letters 27 (2006) 814
    DOI: 10.1109/LED.2006.882581
  • H. D. B. Gottlob, T. Echtermeyer, T. Mollenhauer, J. Efavi, M. Schmidt, T. Wahlbrink, M. C. Lemme, H. Kurz, M. Czernohorsky, E. Bugiel, H.-J. Osten, A. Fissel (2006): CMOS Integration of Epitaxial Gd2O3 High-K Gate DielectricsSolid State Electronics 50 (2006) 979
    DOI: 10.1016/j.sse.2006.04.018
  • H. D. B. Gottlob, T. Echtermeyer, T. Mollenhauer, M. Schmidt, J. K. Efavi, T. Wahlbrink, M. C. Lemme, H. Kurz, R. Endres, Y. Stefanov, U. Schwalke, M. Czernohorsky, E. Bugiel, A. Fissel, H.-J. Osten (2006): Approaches to CMOS integration of epitaxial gadolinium oxide high-K dielectricsProceedings of the 36th European Solid-State Device Research Conference (2006) 150
    DOI: 10.1109/ESSDER.2006.307660
  • H.-J. Osten, A. Fissel, O. Kirfel, Z. Elassar, E. Bugiel, M. Czernohorsky (2006): Interface formation during epitaxial growth of binary metal oxides on siliconNano-Electronic Semiconductor Devices: Defects in High-k Gate Dielectric Stacks, Editor E. Gusev, Springer Netherlands (2006) 361
    DOI: 10.1007/1-4020-4367-8_29
    ISSN: 978-1-4020-4365-9
  • H.-J. Osten, M. Czernohorsky, E. Bugiel, D. Kuehne, A. Fissel (2006): Interface Engineering During Epitaxial Growth of High-K Lanthanide Oxides on SiliconMRS Proceedings 917: Gate Stack Scaling - Materials Selection, Role of Interfaces, and Reliability Implications, Editors: R. Jammy, A. Shanware, V. Misra, Y. Tsunashima, S. DeGendt (2006) 0917-E10-04
    DOI: 10.1557/PROC-0917-E10-04
  • M. Czernohorsky, A. Fissel, E. Bugiel, O.Kirfel, H.-J. Osten (2006): Impact of Oxygen Supply during Growth on the Electrical Properties of Crystalline Gd2O3 Thin Films on Si(001)Applied Physics Letters 88 (2006) 152905
    DOI: 10.1063/1.2194227
  • A. Fissel (2005): Molecular Beam Epitaxy of Semiconductor Nanostructures Based on SiCMaterials Science Forum 483 (2005) 163
    DOI: 10.4028/www.scientific.net/MSF.483-485.163
  • A. Fissel, C. Wang, E. Bugiel, H.J. Osten (2005): Epitaxial growth of non-cubic siliconMicroelectronics Journal 36 (2005) 506
    DOI: 10.1016/j.mejo.2005.02.064
  • E. Bugiel, H. J. Osten, A. Fissel, O. Kirfel, M. Czernohorsky (2005): TEM investigations of epitaxial high-k dielectrics on siliconSpringer Proceedings in Physics 107 (2005) 343
    DOI: 10.1007/3-540-31915-8_73
  • H.J. Osten, E. Bugiel, O. Kirfel, M. Czernohorsky, A. Fissel (2005): MBE growth and properties of epitaxial metal oxides for high-k dielectricsJournal of Crystal Growth 278 (2005) 18
    DOI: 10.1016/j.jcrysgro.2004.12.051
  • H.J. Osten, J. Dabrowski, H.-J. Müssig, A. Fissel, V. Zavodinsky (2004): High-K dielectrics: the example of Pr2O3, Challenges in Process Simulation(ed.J. Dabrowski and E.R. Weber, Springer Verlag 2004), pp. 259-293
    DOI: 10.1007/978-3-662-09432-7_7
  • A. Fissel (2003): Artificially layered heteropolytypic Structures based on SiC Polytypes: Molecular Beam Epitaxy, Characterization and PropertiesPhysics Reports 379 (2003) 149
    DOI: 10.1016/S0370-1573(02)00632-4
  • A. Fissel, H.J. Osten, E. Bugiel (2003): Towards understanding epitaxial growth of alternative high-k dielectrics on Si(001): Application to praseodymium oxideJournal of Vacuum Science and Technology B 21 (2003) 1765
    DOI: 10.1116/1.1589516
  • A. Fissel, J. Dabrowski (2003): Si Adsorption on SiC(0001) SurfacesSurface Review and Letters 10 (2003) 849
    DOI: 10.1142/S0218625X03005645
  • F. Bechstedt, A. Fissel, J. Furthmüller, U. Kaiser, H.-C. Weisker, W. Wesch (2003): Quantum structures in SiCApplied Surface Science 212-213 (2003) 820
    DOI: 10.1016/S0169-4332(03)00068-0
  • H.J. Osten, E. Bugiel, A. Fissel (2003): Epitaxial Praseodymium Oxide: A New High-K DielectricMaterial Research Society Symposium Proceeding 744 (2003) 15
    DOI: 10.1557/PROC-744-M1.5
  • H.J. Osten, E. Bugiel, A. Fissel (2003): Epitaxial praseodymium oxide: a new high-k dielectricSolid-State Electronics 47 (2003) 2165
    DOI: 10.1016/S0038-1101(03)00190-4
  • A. Fissel (2002): About heteropolytypic Structures: Molecular beam epitaxy, characterization and properties of Silicon CarbideRecent Research Developments in Materials Science and Engineering 1; Transworld Research Network, Fort P.O., Trivandrum, Kerala, India, 2002, pp. 277-327
    ISBN: 978-8178950570
  • A. Fissel, J. Dabrowski, H.J. Osten (2002): Photoemission and ab initio theoretical study of interface and film formation during epitaxial growth and annealing of praseodymium oxide on Si(001)Journal of Applied Physics 91 (2002) 8986
    DOI: 10.1063/1.1471943
  • F. Bechstedt, A. Fissel, U. Grossner, U. Kaiser, H.-C. Weisker, W. Wesch (2002): Towards quantum structures in SiCMaterials Science Forum 389-393 (2002) 737
    DOI: 10.4028/www.scientific.net/MSF.389-393.737
  • U. Kaiser, Th. Kups, A. Fissel, W. Richter (2002): Structure of SiC quantum wells studied by TEM and CBEDCrystal Research and Technology 37 (2002) 466
    DOI: 10.1002/1521-4079(200205)37:5<466::AID-CRAT466>3.0.CO;2-I