-
U. Singh, H. Genath, R. Sarkar, J. Krügener, H.J. Osten, A. Laha
(2023):
All Epitaxy Nd2O3/AlGaN/GaN MOSHEMT on semi-insulating (0001) 4H-SiC: Increased thermal stability at 473 K,
14th International Conference on Nitride Semiconductors (ICNS14), Fukuoka, Japan, 12. - 17.11.2023
-
H. Genath, Y. Barnscheidt, H. J. Osten
(2021):
Epitaxy of Gd2O3 layers on virtual SiGe substrates on Si(111),
German MBE Workshop 2021, online event, 14. - 15.10.2021
-
P. Gribisch, A. Fissel
(2019):
Tuning of morphology and crystal structure of Gd2O3 grown on Si(001),
XXth International Workshop on the Physics of Semiconductor Devices (IWPSD 2019), Kolkata, India, 17.-20.12.2019
-
P. Gribisch, A. R. Chaudhuri, A. Fissel
(2019):
Growth and dielectric properties of monoclinic Gd2O3 on Si(001),
2nd Joint ISTDM / ICSI 2019 Conference, Madison, USA, 02.-06.06.2019
DOI:
10.1149/09301.0057ecst
-
A. Grimm, J. Ruhkopf, E. Bugiel, T. Wietler
(2018):
Epitaxial Gd2O3 as surface domain indicator: Towards single domain Ge films grown on Si by surfactant-mediated epitaxy,
German MBE Workshop 2018, Freiburg, Germany, 11.-12.10.2018
-
P. Gribisch, J. Schmidt, H. J. Osten, A. Fissel
(2018):
Influence of Gd2O3 nanostructure formation on crystal structure and surface morphology during growth on Si(001),
German MBE Workshop 2018, Freiburg, Germany, 11.-12.10.2018
-
A. Joseph, D. Tetzlaff, J. Schmidt, R. Böttger, T.F. Wietler, H.J. Osten
(2016):
Properties of high-dose nitrogen implanted epitaxially grown Gd2O3 on silicon,
EMN Meeting on Epitaxy, Budapest, Hungary, 04.-08.09.2016
-
A. Joseph, D. Tetzlaff, J. Schmidt, R. Böttger, T.F. Wietler, H.J. Osten
(2016):
Properties of high-dose nitrogen implanted epitaxially grown Gd2O3 on silicon,
Deutscher MBE-Workshop, Garching, Germany, 13.-14.10.2016
-
H. Genath, J. Schmidt, D. Tetzlaff, K. Gosh, A. Laha, and H.J. Osten
(2016):
Epitaxy of Gd2O3 Layers on Virtual GaN Substrates,
LNQE Nanoday 2016, Hannover, Germany, 29.09.2016
-
A. R. Chaudhuri (invited)
(2015):
Tuning dielectric properties of epitaxial Lanthanide oxides on Si by defect passivation,
Materials Research Society (MRS) Fall Meeting, Boston, USA, 29.11.-04.12.2015
-
E. Köhnen, J. Krügener, and H.J. Osten
(2015):
Surface passivation of ion implanted, Al2O3-passivated p+ emitters,
LNQE Nanoday 2015, Hannover, Germany, 01.10.2015
-
M. Möllers, C. Margenfeld, D. Schwendt, E. Bugiel, T. F. Wietler, and H. J. Osten
(2015):
Non-cubic Gd2O3 on Silicon (111) Substrates,
LNQE Nanoday 2015, Hannover, Germany, 01.10.2015
-
M. Möllers, C. Margenfeld, D. Schwendt, E. Bugiel, T. F. Wietler, and H. J. Osten
(2015):
Non-cubic Gd2O3 on Silicon (111) Substrates,
Deutscher MBE-Workshop, Paderborn, Germany, 21.-22.09.2015
-
A. R. Chaudhuri, A. Fissel, H.-J. Osten
(2014):
Template assisted growth and dielectric properties of Gd2O3 thin films on Si(100),
E-MRS 2014 Spring Meeting, Lille, France, 26.-30.05.2014
-
C. Margenfeld
(2014):
Thermally induced phase change of rare earth oxides,
Deutscher MBE-Workshop, Darmstadt, Germany, 15.-16.09.2014
-
H.-J. Osten (invited), D. Schwendt, A. R. Chaudhuri, A. Fissel, P. Shekhter, M. Eizenberg
(2014):
Tuning Dielectric Properties of Epitaxial Lanthanide Oxides on Silicon,
225th Electrochemical Society Meeting, Orlando, Florida, USA, 11.-15.05.2014
-
K. Ghosh, S. Das, A. Fissel, H.-J. Osten, A. Laha
(2014):
Long term reliability study of epitaxial neodymium-gadolinium oxides (NGO) on Si substrates for future group IV based CMOS devices,
E-MRS 2014 Spring Meeting, Lille, France, 26.-30.05.2014
-
P. Shekhter, A. R. Chaudhuri, A. Laha, S. Yehezkel, A. Shriki, H.-J. Osten, M. Eizenberg
(2014):
The influence of carbon doping on the electric behavior of Gd2O3 as high-k gate dielectric,
AVS 61th International Symposium and Exhibition, Baltimore, Maryland, USA, 09.-14.11.2014
-
A. R. Chaudhuri, A. Fissel, H.-J. Osten
(2013):
Enhanced Dielectric Properties of Nitrogen Doped Epitaxial Gd2O3 Thin Films on Si,
E-MRS 2013 Fall Meeting, Warzaw, Poland, 16.-20.09.2013
-
A. R. Chaudhuri, A. Fissel, H.-J. Osten
(2013):
Enhanced Dielectric Properties of Nitrogen Doped Epitaxial Gd2O3 Thin Films on Si,
NanoDay 2013, Hannover, Germany, 10.10.2013
-
A. R. Chaudhuri, A. Fissel, H.-J. Osten
(2013):
Improving Dielectric Properties of Epitaxial Gd2O3 Thin Films on Si by Dopant Incorporation,
30th North American Conference on Molecular Beam Epitaxy (NAMBE 2013), Banff, Alberta, Canada, 05.-11.10.2013
-
D. Schwendt, P. Shekhter, M. Eizenberg, H.-J. Osten
(2013):
Tuning the properties of rare-earth oxides for advanced nano-electronic applications,
First Conference of Scientific Cooperation between Lower Saxony and Israel, Hannover, Germany, 06.-07.10.2013
-
H.-J. Osten (invited)
(2013):
Improving Dielectric Properties of Epitaxial Lanthanide Oxides on Silicon,
AVS 60th International Symposium and Exhibition, Long Beach, California, USA, 27.10.-01.11.2013
-
D. Schwendt
(2012):
Spannungseffekte in dünnen, epitaktischen Seltene Erden-Oxiden,
Deutscher MBE-Workshop, Hannover, Germany, 11.-12.09.2012
-
D. Schwendt, H.-J. Osten
(2012):
Influence of strain on dielectric properties of rare earth oxides,
17th Workshop on Dielectrics in Microelectronics (WoDiM 2012), Dresden, Germany, 25.-27.06.2012
-
H.-J. Osten
(2012):
Epitaxial Oxides on Silicon for CMOS and Beyond,
Indian Institute of Technology Hyderabad, Hyderabad, India, 13.12.2012
-
H.-J. Osten (invited)
(2012):
Strain-driven enhancement of dielectric properties in thin metal oxides layers epitaxially grown on silicon,
International Conference on Emerging Electronics (ICEE), Mumbai, India, 15.-17.12.2012
-
H.-J. Osten (invited), D. Schwendt
(2012):
Strain Effects on Dielectric Properties of Thin, Crystalline Rare Earth Oxides on Silicon,
222th Electrochemical Society Meeting, Honolulu, Hawaii, USA, 07.-12.10.2012
-
A. Grimm, D. Schwendt, H.-J. Osten
(2011):
Structural investigation of epitaxial high-k gate dielectrics,
Deutscher MBE-Workshop 2011, Berlin, Germany, 05.-06.10.2011
-
D. Schwendt, H.-J. Osten
(2011):
Photoelectron spectroscpoy of ultrathin epitaxial rare earth oxides on silicon,
Frühjahrstagung der Deutschen Physikalischen Gesellschaft, Dresden, Germany, 13.-18.03.2011
-
H.-J. Osten (invited)
(2011):
Epitaxial Lanthanide Oxides on Silicon for CMOS and Beyond,
7th International Conference on Si Epitaxy and Heterostructures (ICSI 7), Leuven, Belgium, 28.08.-01.09.2011
-
H.-J. Osten (invited)
(2011):
Epitaxial Oxides on Silicon for CMOS and Beyond,
38th Conference on the Physics & Chemistry of Surfaces & Interfaces (PCSI), San Diego, California, USA, 16.-20.01.2011
-
A. Laha, E. Bugiel, H.-J. Osten, A. Fissel, V. V . Afanas’ev, M. Badylevich
(2010):
Semiconductor Nanostructures in Crystalline Rare Earth Oxide for Nanoelectronic Device Applications,
22nd International Conference on Microelectronics (ICM2010), 2010, Cairo, Egypt, 19.-22.12.2010
DOI:
10.1109/ICM.2010.5696129
-
D. Müller-Sajak, H. Pfnür, A. Cosceev, K. R. Hofmann
(2010):
Crystalline lattice-matched B 0.7Sr0.3O on Si(001) as Gate Dielectric,
Electronic Materials Conference, Notre-Dame, Indiana, USA, 23.-25.06.2010
-
D. Schwendt, E. Bugiel, H.-J. Osten
(2010):
Tuning the Properties of Crystalline Lanthanide Oxides on Silicon,
International Symposium on Integrated Functionalities (ISIF) 2010, San Juan, Puerto Rico, 13.-16.06.2010
-
H.-J. Osten (invited)
(2010):
Introducing Crystalline Rare-Earth Oxides into Si-based Electronics,
International Symposium on Integrated Functionalities (ISIF) 2010, San Juan, Puerto Rico, 13.-16.06.2010
-
H.-J. Osten, A. Laha, A. Fissel
(2010):
Si Nanostructures Embedded into Crystalline Rare-Earth Oxide Matrix for Opto and Nano Electronic Applications,
4th International Conference on Quantum, Nano and Micro Technologies (ICQNM 2010), Sint Maarten, Netherlands Antilles, 10.-16.02.2010
-
R. Endres, H. Gottlob, M. Schmidt, D. Schwendt, H.-J. Osten, U. Schwalke
(2010):
Crystalline Gadolinium Oxide: A Promising High-k Candidate for Future CMOS Generations,
218th ECS Meeting, Las Vegas, Nevada, USA, 10.-15.10.2010
-
R. Ranjith, A. Laha, E. Bugiel, H.-J. Osten
(2010):
Growth and studies of ultra thin Gd2O3 layers and Gd2O3/Si/Gd2O3 stacking on p-Si(111) wafers by molecular beam epitaxy for resonant tunnel diode applications,
16th International Conference on Molecular Beam Epitaxy (MBE2010), 2010, Berlin, Germany, 22.–27.08.2010
-
A. Fissel, A. Laha, E. Bugiel, R. Dargis, A. Ali, H. J. Osten
(2009):
Tailoring of Si nanostructures embedded into epitaxial oxides for various applications,
17th International Conference on Composites/Nano Engineering (ICCE-17), Honolulu, USA, 26.07.-01.08.2009
-
A. Laha, E. Bugiel, A. Fissel, H.-J. Osten
(2009):
Epitaxial Gd2O3 on strained Si1-xGex layers: Growth and electrical characterization,
E-MRS 2009, Symposium I, Strasbourg, France, 08.-12.06.2009
-
A. Laha, M. Jestremski, E. Bugiel, D. Wong, A. Fissel, H.-J. Osten, Ashkar Ali, S. Datta
(2009):
Si Nanostructures Embedded into Crystalline Rare Earth Oxide Matrix for Opto and Nano-electronic Device Application,
2009 International Conference on Mechanical and Electronics Engineering (ICMEE), Chennai, India, 27.-29.06.2009
-
A. Laha, M. Jestremski, E. Bugiel, D. Wong, and H.-J. Osten, A. Fissel, A. Ali, S. Datta
(2009):
Quantum Effects in Group IV Nanostructures Embedded into Crystalline Rare Earth Oxides on Silicon Substrates,
International Conference on Materials for Advanced Technologies (ICMAT2009), Singapore, 28.06.-03.07.2009
-
A. N. Nazarov, V. S. Lysenko, Y. V.Gomeniuk, Y. Y.Gomeniuk, H.-J. Osten, A. Laha
(2009):
Interface and bulk properties of MBE-grown rare-earth metal oxides on silicon,
216th ECS Meeting, Wien, Austria, 04.-09.10.2009
-
D. Müller-Sajak, A. Cosceev, H. Pfnür, K. R. Hofmann
(2009):
Investigation of Epitaxy and Electrical Properties of the Alkaline-Earth Oxides BaO, SrO and Ba0.7Sr0.3O on Si(001) as Alternative Gate Dielectrics,
6th International Conference on Silicon Epitaxy and Heterostructures, ICSI-6, Los Angeles, USA, 17.-22.05.2009
-
D. Schwendt, D. Tetzlaff, E. Bugiel, H.-J. Osten
(2009):
Stability of Crystalline Gd2O3 Thin Films on Silicon during Post-growth Processing,
3rd International Conference on Signals, Circuits and Systems (SCS’09), Djerba, Tunesia, 06.-08.11.2009
-
H.-J. Osten (invited)
(2009):
Introducing Crystalline Rare-Earth Oxides into Si-based Electronics,
XVth International Workshop on the Physics of Semiconductor Devices (XVth IWPSD), Delhi, India, 15.-19.12.2009
-
H.-J. Osten (invited)
(2009):
Epitaxy of High-K Oxides,
15th Euro-MBE, Zakopane, Poland, 08.-11.03.2009
-
H.-J. Osten, A. Laha, A. Fissel (invited)
(2009):
Epitaxial Lanthanide Oxide based Gate Dielectrics,
MRS Spring Meeting, San Francisco, California, USA, 13.-17.04.2009
-
J. Wang, A. Laha, A. Fissel, D. Schwendt, R. Dargis, T. Watahiki, T. Liu, H.-J. Osten
(2009):
Structural Study of Epitaxially Grown Nano-thick Nd2O3/Si(111) Heterostructure,
4th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Shenzhen, China, 05.-08.01.2009
-
K. R. Hofmann, A. Cosceev, D. Müller-Sajak, H. Pfnür
(2009):
Crystalline lattice-matched Ba0.7Sr0.3O on Si(001) as Gate Dielectric,
IEEE Semiconductor Interface Specialists Conference (SISC), Arlington, USA, 03.-05.12.2009
-
R. Dargis, A. Fissel, D. Schwedt, E. Bugiel, J. Krügener, T. Wietler, A. Laha, H.-J. Osten
(2009):
Epitaxial Growth of Silicon on Rare-Earth Metal oxide,
4th Symposium on Vacuum based Science and Technology, Koszalin-Kolobrzeg, Poland, 21.-23.09.2009
-
A. Laha, A. Fissel, E. Bugiel, M. Badylevich, V. Afanas'ev, H.-J. Osten
(2008):
Integration of low dimensional crystalline Si into functional epitaxial oxides for next generation solar cell application,
Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) 2008, Sydney, Australia, 28.07.-01.08.2008
-
A. Laha, E. Bugiel, A. Fissel, H.-J. Osten
(2008):
Si-nanoclusters embedded into epitaxial rare earth oxides: potential candidate for non-volatile memory applications,
E-MRS Meeting 2008, Strasbourg, France, 27.-31.05.2008
-
A. Laha, E. Bugiel, R. Dargis, D. Schwendt, M. Badylevich, V. Afanasiev, A. Fissel, H.-J. Osten
(2008):
Integration of low dimensional crystalline Si into functional epitaxial oxides,
Workshop on Recent Advances of Low Dimensional Structures and Devices (WRA-LDSD) Nottingham, UK, 07.-09.04.2008
-
M. Badylevich, S. Shamuilia, V. V. Afanas’ev, A. Stesmans A. Laha, H.-J. Osten, A. Fissel
(2008):
Electronic structure of interfaces of cubic Gd2O3 with Si(111) and Si nano-clusters,
E-MRS Meeting 2008, Strasbourg, France, 27.-31.05.2008
-
M. C. Lemme, H. D. B. Gottlob, T. J. Echtermeyer, H. Kurz, R. Endres, U. Schwalke, M. Czernohorsky, H.-J. Osten
(2008):
CMOS Integration of Epitaxial Gd2O3,
5th Workshop on Dielectrics in Microelectronics (WoDiM), Bad Saarow, Germany, 23.-25.06.2008
-
Q.-Q. Sun, A. Laha, H.-J. Osten, S.-J. Ding, D. W. Zhang, A. Fissel
(2008):
Electrical Characterization of Ultrathin Single Crystalline Gd2O3/Si(100) with Pt Top Electrode,
9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT 2008), Beijing, China, 20.-23.10.2008
-
R. Dargis, A. Fissel, E. Bugiel, T. Wietler, D. Schwendt, A. Laha, H.-J. Osten
(2008):
Development of multi-step procedure for epitaxial growth of crystalline silicon on rare-earth-metal oxide for SOI-applications,
14th International Conference on Solid Films and Surfaces (ICSFS), Dublin, 29.06.-04.07.2008
-
T. Wietler, A. Laha, E. Bugiel, M. Czernohorsky, R. Dargis, A. Fissel, H.-J. Osten
(2008):
Epitaxial growth of Gd2O3 on Ge films grown by surfactant-mediated epitaxy on Si(001) substrates,
4th International SiGe Technology and Device Meeting (ISTDM 2008), Taiwan, 11.-14.05.2008
-
A. Fissel, D. Kühne, E. Bugiel, A. Laha, M. Czernohorsky, R. Dargis, H.-J. Osten
(2007):
Silicon in functional epitaxial oxides: A new group of nanostructures,
The 6th International Conference on Low Dimensional Structures and Devices (LDSD), San Andres, Colombia, 15.-20.04.2007
-
A. Laha, A. Fissel, H.-J. Osten
(2007):
Engineering the interface between epitaxial lanthanide oxide thin films and Si substrates: A route towards tuning the electrical properties,
15th Conference on Insulating Films on Semiconductors (INFOS), Athens, Greece, 20.-23.06.2007
-
A. Laha, D. Kühne, E. Bugiel, A. Fissel, H.-J. Osten
(2007):
Confining single crystal Si-nanoclsuters into epitaxial rare earth oxides: Taking advantage of quantum phenomena to pratical applications,
IUMRS-ICAM, Bangalore, India, 08.-13.10.2007
-
A. N. Nazarov, Y. V. Gomeniuk, Y. Y. Gomeniuk, H. D. B. Gottlob, M. Schmidt, M. C. Lemme, M. Czernohorsky, H.-J. Osten
(2007):
Charge trapping in ultrathin Gd2O3 high-k dielectric,
15th Conference on Insulating Films on Semiconductors (INFOS), Athens, Greece, 20.-23.06.2007
-
B. Raissi, J. Piscator, O. Engström, S. Hall, O. Buiu, M. C. Lemme, H. D. B. Gottlob, P. K. Hurley, K. Cherkaoui, and H.-J. Osten
(2007):
High-K-oxide/silicon interfaces characterized by capacitance frequency spectroscopy,
37th European Solid-State Device Research Conference, München, Germany, 11.-13.09.2007
-
E. Bugiel, A. Fissel, M. Czernohorsky, A. Laha, H.-J. Osten (invited)
(2007):
Integration of Functional Epitaxial Oxides into Silicon: A TEM Investigation,
Microscopy Conference, Saarbrücken, 02.-07.09.2007
-
E. Lipp, M. Eizenberg, M. Czernohorsky, H.-J. Osten
(2007):
Thermal stability of Pt/Epitaxial Gd2O3/Si Stacks,
MRS Spring Meeting 2007, San Francisco, California, USA, 09.-13.04.2007
-
H.-J. Osten (invited)
(2007):
Crystalline Rare-Earth Oxides as High-k Materials for Future CMOS Technologies,
212th ECS Meeting, Washington, D.C., USA, 07.-12.10.2007
-
H.-J. Osten (invited)
(2007):
From high-K application to nanostructures: Integration of epitaxial gadolinium oxide into silicon,
5th International Conference on Silicon Epitaxy and Heterostructures (ICSI-5), Marseille, France 20.-24.05.2007
-
H.-J. Osten, D. Kühne, A. Laha, R. Dargis, M. Czernohorsky, E. Bugiel, A. Fissel (invited)
(2007):
Integration of Functional Epitaxial Oxides into Silicon: From High-K Application to Nanostructures,
Jahrestagung der Deutsche Physikalischen Gesellschaft, Regensburg, Germany, 25.-30.03.2007
-
H.-J. Osten, M. Czernohorsky, R. Dargis, A. Laha, D. Kühne, E. Bugiel, A. Fissel (invited)
(2007):
Integration of functional epitaxial oxides into silicon: From high-k application to nanostructures,
15th Conference on Insulating Films on Semiconductors (INFOS), Athens, Greece, 20.-23.06.2007
-
A. Fissel, M. Czernohorsky, H.-J. Osten
(2006):
Properties of crystalline rare-earth oxide high-k dielectrics grown by molecular beam epitaxy on silicon carbide,
E-MRS 2006 Spring Meeting, Nice, France, 29.05.-02.06.2006
-
A. Fissel, M. Czernohorsky, R. Dargis, H.-J. Osten
(2006):
Growth and Properties of Crystalline Gadolinium Oxide Dielectric Layers On Silicon Carbide for High-K Application,
6th European Conference on Silicon Carbide and Related Materials (ECSCRM), Newcastle upon Tyne, UK, 03.-07.09.2006
-
A. Laha, A. Fissel, E. Bugiel, H.-J. Osten
(2006):
Comparative Investigation of Epitaxial Gd2O3 Thin Films Grown on Si Substrates with Different Orientations for High-K Application,
48th Electronic Materials Conference, Pennsylvania State University, Pennsylvania, USA, 28.-30.06.2006
-
A. Laha, A. Fissel, E. Bugiel, O. Kirfel, H.-J. Osten
(2006):
Epitaxial multi-component rare earth oxide for high-K application,
E-MRS 2006 Spring Meeting, Nice, France, 29.05.-02.06.2006
-
H.-J. Osten (invited)
(2006):
MBE growth and Properties of Crystalline Oxide/Silicon/Oxide Nanostructures,
ESF Exploratory Workshop, Como, Italy, 12.-13.09.2006
-
H.-J. Osten, A. Laha, A. Fissel
(2006):
Influence of Si substrate orientation on growth and electrical properties of epitaxial Gd2O3 thin films for high-κ application,
37th IEEE Semiconductor Interface Specialists Conference (SISC), San Diego, 06.-09.12.2006
-
H.-J. Osten, D. Kühne, A. Laha, M. Czernohorsky, E. Bugiel, A. Fissel
(2006):
Integration of functional epitaxial oxides into silicon: From high-k application to nanostructures,
24th North American Conference on Molecular Beam Epitaxy, Durham, North Carolina, USA, 08.-11.10.2006
-
H.-J. Osten, M. Czernohorsky, E. Bugiel, D. Kühne, A. Fissel
(2006):
Interface engineering during epitaxial growth of high-k lanthanide oxides on silicon,
MRS Spring Meeting 2006, San Francisco, California, USA, 18.-21.04.2006
-
M. Czernohorsky, A. Fissel, H.-J. Osten
(2006):
Characterization of crystalline rare-earth oxide high-k dielectrics grown by molecular beam epitaxy on silicon carbide,
33rd Conference on the Physics and Chemistry of Semiconductor Interfaces (PCSI), Cocoa Beach, Florida, USA, 15.-19.01.2006
-
M. Czernohorsky, A. Fissel, R. Dargis, E. Bugiel, H.-J. Osten
(2006):
Wachstum von kristallinem Gadoliniumoxid auf Silicium,
Deutscher MBE Workshop, Hamburg, Germany, 26.-27.09.2006
-
O. Kerker, T. F. Wietler, K. R. Hofmann
(2006):
Characterization of HfO2 deposited by reactive sputtering as gate dielectric for epitaxial Ge-MOSFETs on Si wafers,
E-MRS 2006 Spring Meeting, Nice, France, 29.05.-02.06.2006
-
R. Dargis, A. Fissel, M. Czernohorsky, H.-J. Osten
(2006):
Epitaxie von Gadoliniumoxid auf Siliziumcarbid,
Deutscher MBE Workshop, Hamburg, Germany, 26.-27.09.2006
-
A. Fissel, O. Kirfel, Z. Elassar, E. Bugiel, M. Czernohorsky, H. J. Osten
(2005):
Interface formation during epitaxial growth of Neodymium Oxide on Si(001),
207th Electrochemical Society Meeting, Quebec (Canada), 15.-20.05.2005
-
E. Bugiel, H.J. Osten, A. Fissel, O. Kirfel, M. Czernohorsky
(2005):
TEM investigations of Epitaxial High-k Dielectrics on Silicon,
Microscopy of Semiconductor Materials (MSM) XIV Conference, Oxford (UK), 11.-14.04.2005
-
H.-J. Osten
(2005):
Interface formation during epitaxial growth of binary metal oxide on silicon,
NATO workshop Defects in High-K Materials, St. Petersburg, Russia, 11.-14.07.2005
-
H.-J. Osten (invited)
(2005):
MBE of rare earth oxides,
European Science Foundation, Exploratory Workshop, San Remo, Italy, 11.-13.05.2005
-
H.D.B. Gottlob, T. Echtermeyer, T. Mollenhauer, J. Efavi, M. Schmidt, T. Wahlbrik, M.C. Lemme, H. Kurz, M. Czernohorsky, E. Bugiel, H.J. Osten, O. Kirfel, A. Fissel
(2005):
Crystalline Gd2O3 High-k Gate Dielectrics with TiN Capped Fully Silicided (FUSI) NiSi Electrodes,
36th IEEE Semiconductor Interface Specialists Conference (SISC), Arlington (USA), 01.-03.12.2005
-
M. Czernohorsky, O. Kirfel, Z. Elassar, E. Bugiel, A. Fissel, H.-J. Osten
(2005):
MBE Growth and Interface Formation of Neodymium Oxide on Silicon,
13th Euro-Konferenz Molecular Beam Epitaxy, Grindelwald, Switzerland, 07.-09.03.2005
-
M. F. Beug, R. Ferretti, K. R. Hofmann
(2005):
Polarity dependent generation of gate-side and substrate-side border traps in nitrided gate oxides,
Insulating Films on Semiconductors, INFOS 2005, Leuven, Belgium, 22.-24.06.2005
-
O. Kerker, J. Zachariae, F. Mirza, R. Ferretti, K. R. Hofmann
(2005):
Investigation of Electrical and Optical Properties of BaxSr1-xO Gate Oxide MIS Structures,
DPG-Frühjahrstagung, Berlin, Germany, 04.-09.03.2005
-
H.-J. Osten, E. Bugiel, A. Fissel, O. Kirfel (invited)
(2004):
Epitaxial Silicon/Metal Oxide Stacks for various applications,
11th Advanced Heterostructure Workshop, Hawaii, USA, 05.-10.12.2004
-
A. Fissel, H.-J. Osten, and E. Bugiel (invited)
(2003):
Towards understanding epitaxial growth of alternative high-K dielectrics on Si(001): Application to Praseodymium Oxide,
Physics and Chemistry of Semiconductor Interfaces, Salt Lake City, Utah, USA, 19.-23.01.2003
-
F. Beug, R. Ferretti, K. R. Hofmann
(2003):
Detailed investigation of the transient local tunneling in gate oxides,
2003 IEEE International Reliability Physics Symposium, Dallas, Texas, USA, 30.03.-04.04.2003
-
H.-J. Osten, A. Bugiel, A. Fissel (invited)
(2003):
Understanding epitaxial growth of alternative high-K dielectrics on Si(001),
ESF Workshop, Zürich, Switzerland, 17.-18.03.2003
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H.-J. Osten, A. Fissel (invited)
(2003):
Epitaxial High-K Materials,
12th EURO-MBE 2002, Bad Hofgastein, Austria, 16.-19.02.2003
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H.-J. Osten, E. Bugiel, A. Fissel
(2002):
Epitaxial Praseodymium Oxide: A New High-K Dielectric,
9th International Workshop on Oxide Electronics (WOE), St. Peter Beach, Florida, Oct. 2002
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H.-J. Osten, E. Bugiel, A. Fissel (invited)
(2002):
Epitaxial Praseodymium Oxide: A New High-K Dielectric,
Material Research Society, Fall Meeting, Symp. M, Boston, 02.-05.12.2002
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U. Schwalke, K. Boye, K. Haberle, R. Heller, G. Hess, G. Müller, T. Ruland. G. Tzschöckel, H.-J. Osten, A. Fissel, H. J. Müssig (invited)
(2002):
Process Integration of Crystalline Pr2O3 High-K Gate Dielectrics,
32th European Solid-State Device Research Conference (ESSDERC 2002), Firenze, Italy, 24.-26.09.2002